Utilization of yb: and nd: mode-locked oscillators in solid-state short pulse laser systems

ABSTRACT

An optimized Yb: doped fiber mode-locked oscillator and fiber amplifier system for seeding Nd: or Yb: doped regenerative amplifiers. The pulses are generated in the Yb: or Nd: doped fiber mode-locked oscillator, and may undergo spectral narrowing or broadening, wavelength converting, temporal pulse compression or stretching, pulse attenuation and/or lowering the repetition rate of the pulse train. The conditioned pulses are subsequently coupled into an Yb: or Nd: fiber amplifier. The amplified pulses are stretched before amplification in the regenerative amplifier that is based on an Nd: or Yb: doped solid-state laser material, and then recompressed for output.

CROSS-REFERENCES TO RELATED APPLICATIONS

This is a Continuation of application Ser. No. 12/132,364 which is aDivisional of U.S. application Ser. No. 10/960,923 filed Oct. 12, 2004,which is a Continuation-In-Part of co-pending U.S. application Ser. No.09/576,772 filed May 23, 2000 which issued as U.S. Pat. No. 6,885,683 onApr. 26, 2005, the disclosure of which is incorporated by reference inits entirety.

TECHNICAL FIELD OF THE INVENTION

The object of this invention is to optimize an Yb: or Nd: doped fibermode-locked oscillator and fiber amplifier system for seeding arelatively new class of Nd: or Yb: doped regenerative amplifiers. Thesesystems are seeing a significant interest since they are more suitablefor industrial applications. An optimized Yb: doped fiber mode-lockedoscillator and fiber amplifier for seeding these regenerative amplifierscan improve the robustness and practicality of such systems forindustrial applications.

BACKGROUND OF THE INVENTION

Regenerative amplifiers utilizing chirped pulse amplification (CPA) havebeen the dominant means for obtaining higher pulse energies withpicosecond and femtosecond pulse duration. The CPA regenerativeamplifier was first demonstrated for picosecond amplification inNd:glass in by Gerard Mourou and Donna Strickland, Compression ofAmplified Chirped Optical Pulses, Optics Communications 56 (3): 219-221,Dec. 1, 1995.

The development of broad band solid state lasers as regenerativeamplifiers was first demonstrated by D. Harter and P. Bado, WavelengthTunable Alexandrite Regenerative Amplifier, Applied Optics 27 (21):4392-4395, Nov. 1, 1988 and by D. Harter, O. Montoya, J. Squier and W.Rapoport, Short Pulse Generation in Ti: doped materials, CLEO 1988 PD6.These systems were utilized for femtosecond amplification and werereported by M. Pessot, J. Squier, G. Mourou and D. Harter, Chirped-PulseAmplification of 100-Fsec Pulses, Optics Letters 14 (15): 797-799, Aug.1, 1989 and by J. Squier, F. Salin, G. Mourou and D. Harter, 100-FSPulse Generation and Amplification in Ti—Al2O3, Optics Letters 16 (5):324-326, Mar. 1, 1991.

It is the Ti:sapphire regenerative amplifier that has been the dominantmethod for obtaining femtosecond pulses in the microjoule to millijoulerange. These systems have been made more practical by using modelockedfiber lasers as the source of the short pulses, as first reported by A.Hariharan, M. E. Fermann, M. L. Stock, D. Harter and J. Squier,Alexandrite-pumped Alexandrite Regenerative Amplifier for FemtosecondPulse Amplification, Optics Letters 21 (2): 128-130, Jan. 15, 1996 andlater patented by Clark in U.S. Pat. No. 5,530,582 “Fiber source forseeding an Ultrashort optical pulse amplifier.” This seeding has beenstudied in a number of Ti:sapphire regenerative amplifiers, as reportedby A. Hariharan, D. Harter, T. S. Sosnowski, S. Kane, D. T. Du, T. B.Norris and J. Squier, Injection of Ultrafast Regenerative Amplifierswith Low Energy Femtosecond Pulses from an Er-Doped Fiber Laser, OpticsCommunications 132 (5-6): 469-473, Dec. 15, 1996.

Alternative sources for microjoule level femtosecond pulses are emergingby all fiber designs as first described by M. E. Fermann, A.Galvanauskas and D. Harter, All-Fiber Source Of 100 nJ SubpicosecondPulses, Appl. Phys. Letters Vol. 64, 11, 1994, pp. 1315-1317. During thepast decade, there has been intensive work in making such systemspractical. The recent results were reported by M. Stock, H. Endert andR. Patel, Time-Tailored Laser Pulses: a New Approach for LaserMicromachining and Microfabrication Processing, SPIE Photonics West2003, San Jose and SPIE Publication #4984-28. Such systems should beuseful for lower energy applications such as LASIK as reported by T.Juhasz, H. Frieder, R. M. Kurtz, C. Horvath, J. F. Bille and G. Mourou,Corneal Refractive Surgery with Femtosecond Lasers, IEEE Journal OfSelected Topics In Quantum Electronics 5 (4): 902-910, July-August 1999.

However, for higher pulse energies, the regenerative amplifiers willcontinue to dominate because of practical uses such as micromachining asdescribed by Xinbing Liu and Gerard Mourou, Ultrashort Laser PulsesTackle Precision Machining, Laser Focus World, August 1997, Vol. 33,Issue 8, page 101.

For the micromachining applications, more industrially compatibleregenerative amplifiers are being developed. These systems are based onNd: or Yb: doped materials, rather than the Ti:sapphire that hasdominated the scientific market. There are two basic reasons for thischange. Commercial markets typically do not require the shorter pulsesthat can only be obtained from the Ti:sapphire regenerative amplifierand the Nd: and Yb: based materials can be directly diode pumped, whichmakes these systems more robust and less expensive. An unresolvedtechnical issue for Nd: or Yb: based regenerative amplifiers is the needfor an equally robust seed source for the femtosecond or picosecondpulses. The present lasers are mode-locked solid-state lasers withquestionable reliability. It would be preferable to have a robust fiberlaser similar to that which has been developed for the Ti:sapphireregenerative amplifier.

Historically, both Nd: doped crystals and glasses have been the lasermaterial for most solid-state lasers. The only commercially availableregenerative amplifiers for picosecond or femtosecond pulse besidesTi:sapphire have been Nd: based materials. Ti:sapphire can produce muchshorter pulses. The Nd: crystalline materials such as Nd:YAG, Nd:YLF andNd:Vanadate produce pulses around 10 picoseconds. The Nd:glassregenerative amplifier produces pulses around 0.5-2.0 picoseconds. TheNd:glass regenerative amplifier is the source used in the Laser-AssistedIn-Situ Keratomileusis (LASIK) application and the laser is described byC. Horvath, A. Braun, H. Liu, T. Juhasz and G. Mourou, Compact DirectlyDiode-Pumped Femtosecond Nd:glass Chirped-Pulse-Amplification LaserSystem, Optics Letters 22 (23): 1790-1792, Dec. 1, 1997.

Recently, there has been interest in replacing Nd: lasers with Yb:lasers. The reasons are related to diode pumping. The absorptiontransition is broader than the absorption transition in Nd: lasers, soit is easier to tune the laser diodes to the transition. It is alsopossible to dope the crystals heavily so the diodes are absorbed in asmall area leading to higher gain. The final reason is that thetransition has a small quantum defect from the laser transition so moreefficient lasing is obtained with less heat deposition. The broadertransitions also allow shorter pulse generation. A very good review ofthe advantages of Yb: materials for short pulse is reported by J. Nees,S. Biswal, F. Druon, J. Faure, M. Nantel, G. A. Mourou, A. Nishimura, H.Takuma, J. Itatani, J. C. Chanteloup and C. Honninger, EnsuringCompactness, Reliability, and Scalability for the Next Generation ofHigh-Field Lasers, IEEE Journal Of Selected Topics In QuantumElectronics 4 (2): 376-384 March-April 1998.

However, Yb: materials have some idiosyncrasies that make them morechallenging to use. Typically, the regenerative amplifier activematerial is a four level transition and the gain shape is very constant.This is true with Nd: doped materials and Ti:sapphire. An earlyexception is alexandrite, which has a quasi-three level lasingtransition. The spectrum is quite stable but can be tuned for example bythe excitation level or by large temperature differences. This wasillustrated where the temperature of alexandrite can be used so the gainspectrum of one crystal overlaps the absorption spectrum of anothercrystal. A room-temperature alexandrite laser can pump another hotalexandrite laser as was disclosed by A. Hariharan et al.,Alexandrite-pumped Alexandrite Regenerative Amplifier for FemtosecondPulse Amplification, Optics Letters 21 (2): 128-130, Jan. 15, 1996.

Wavelength shifting of the gain spectrum is also seen in Yb: dopedregenerative amplifiers as is shown in FIG. 6 from H. Liu, J. Nees, G.Mourou, S. Biswal, G. J. Spuhler, U. Keller and N. V. Kuleshov,Yb:KGd(WO ₄)² Chirped-Pulse Regenerative Amplifiers, OpticsCommunications 203 (3-6): 315-321, Mar. 15, 2002. In this case, the seedfemtosecond pulse was at 1027 nanometers and the output was 1038nanometers. Thus, to obtain the optimized wavelength, one needs toinject a different wavelength in order to obtain the optimizedwavelength. However, Table 1 shows that the optimum wavelength isdependent on loss (OC) and can vary as much as 28 nanometers. In fact,the optimum wavelength changes by 1-3 nanometers per percentage of loss!

For Yb:glass, the spectral shift of the input seed to the output isshown clearly in FIG. 4 from H. Liu, S. Biswal, J. Paye, J. Nees, G.Mourou, C. Honninger and U. Keller, Directly Diode-Pumped MillijouleSubpicosecond Yb:glass Regenerative Amplifier, Optics Letters 24 (13):917-919, Jul. 1, 1999. This behavior is partially explained from thefamily of curves in FIG. 2 from C. Honninger, R. Paschotta, M. Graf, F.Morier-Genoud, G. Zhang, M. Moser, S. Biswal, J. Nees, A. Braun, G. A.Mourou, I. Johannsen, A. Giesen, W. Seeber and U. Keller, UltrafastYtterbium-Doped Bulk Lasers and Laser Amplifiers, Applied PhysicsB-Lasers and Optics 69 (1): 3-17, July 1999. The gain peak changes withexcitation dramatically and as the seed pulse is amplified theexcitation value is changing with the saturation of the laser material.Table 2 shows that, with a 7% change in loss, the spectral peak moves 30nanometers and the spectral width changes 65% in Yb:glass. Suchspecification changes need to be considered for long-term operationwhere the loss does increase with time.

It should be clear that it is difficult to design the seed laser for Yb:regenerative amplifiers due to the large changes in the center linewidth and bandwidth caused by pumping level, losses and the Yb: hostmaterial.

There are additional differences with Yb: materials that make themchallenging. One is the round trip gain is lower compared to that in aTi:sapphire regenerative amplifier. In order to obtain the requiredgain, there must be additional round trips in the regenerative amplifierand with more round trips the system is more susceptible to changes inloss due to environment. Also, a 1% change in the round trip loss is asmall change in the overall gain when the round trip gain is 200% inTi:sapphire, but is a very large change in the overall gain when theround trip gain is 10% as is the case in these Yb:doped regenerativeamplifiers.

The thin disk configuration is being considered for high powerindustrial applications. The thin disk refers to doped lasing materialwhere the pump laser is passed multiple times for absorption. The thindisk is mounted on a conductive mirror so that the heat is removedperpendicular to the face of the crystal rather than radially removed inthe typical rod configuration. In a thin disk regenerative amplifier,short pulse amplification has been shown without the use of chirpedpulse amplifiers. This is possible due to the shorter propagationdistances in and larger spot sizes in the thin disk compared toconventional rod solid state desings. This work has been reported by C.Honninger, I. Johannsen, M. Moser, G. Zhang, A. Giesen and U. Keller,Diode-Pumped Thin-Disk Yb: YAG Regenerative Amplifier, Applied PhysicsB-Lasers And Optics 65 (3): 423-426, September 1997. More recent resultshave been published by M. H. Niemz, A. Kasenbacher, M. Strassl, A.Backer, A. Beyertt, D. Nickel and A. Giesen, Tooth Ablation Using aCPA-Free Thin Disk Femtosecond Laser System, Applied Physics B-LasersAnd Optics 79 (3): 269-271, August 2004. The laser system is describedin International Application No. WO 04/068657 A1. In these experiments,a Yb:YAG and a Yb:glass mode-locked laser have been used as the seedsource, respectively. These sources have not met the required stabilityfor an industrial source and there has been great interest in developingstable mode-locked fiber lasers for this application.

A fiber laser has been built to seed an Yb: based regenerativeamplifier. A brief description of this fiber laser for this applicationis given in U.S. Pat. No. 6,760,356, the disclosure of which isincorporated by reference in its entirety. This fiber laser is based onthe identical erbium mode-locked laser that operates at 1.55 micrometersand is converted to 780 nanometers for seeding Ti:sapphire regenerativeamplifiers. However, the frequency is converted to 1040 nanometers forinjection seeding the Yb: regenerative amplifier. This fiber lasersystem is described in detail in co-pending U.S. application Ser. No.09/576,772 entitled MODULAR, HIGH ENERGY, WIDELY-TUNABLE ULTRAFAST FIBERSOURCE and was reported by M. E. Fermann, A. Galvanauskas, M. L. Stock,K. K. Wong and D. Harter, Ultrawide Tunable Er Soliton Fiber LaserAmplified in Yb-Doped Fiber, Optics Letters, Vol. 24, No. 20 pp.1428-1430, Oct. 15, 1999.

However, it is now desirable to have a simpler laser and thus more costeffective solution. An early experiment in injection seeding with afiber laser is described by M. Hofer, M. H. Ober, F. Haberl, M. E.Fermann, E. R. Taylor and K. P. Jedrzejewski, Regenerative Nd GlassAmplifier Seeded with a Nd Fiber Laser, Optics Letters 17 (11): 807-809,Jun. 1, 1992. However, this fiber laser required 6 prisms intracavityand over a meter of free intracavity spacing, and thus, this laser is nomore than a proof of principle demonstration.

Co-pending U.S. application Ser. No. 09/576,772, filed May 23, 2000,which is assigned to the common assignee and the disclosure of which isincorporated by reference in its entirety, discloses the use of a Yb:oscillator, which can be used for the seed source of regenerativeamplifiers with the additional system considerations described here.

SUMMARY OF THE INVENTION

As mentioned earlier, Yb: sources do not have stable spectralperformance. The central wavelength changes with changes in pulse energyor extra loss in the cavity with time. Wavelength shifts due toadditional losses cannot be corrected by increasing the pump level.Additional losses due to dirty intracavity optics or mirrors ormisalignment are not wavelength dependent but additional gain fromhigher excitation modifies the spectral gain profile of the regenerativeamplifier. There are a number of different means to control the spectraloutput of the regenerative amplifier directly, such as an intracavitytuning element. However, these elements will narrow the spectral outputand broaden the temporal pulse output. The present invention is directedto spectral control of the seed source.

The present invention has been made in view of the above circumstancesand to overcome the above problems and limitations of the prior art, andprovides a Nd: or Yb:doped fiber mode-locked oscillator, a Nd: orYb:doped fiber amplifier and a Yb: or Nd:doped solid state regenerativeamplifier that has been optimized for long term operation in industrialapplications. The invention takes advantage of the unique properties anddivergent optical properties of these systems. Regenerative amplifiersbased on Nd: and Yb: have low cross sections that give large energystorage but lower gain. The lower gain affects long-term stability andneeds to be carefully considered in system design. Gain shaping is veryprevalent in Yb: materials. The Yb: lasing transition is a quasi threelevel transition and the gain position is very dependent on excitationand pump power. This leads to spectral shifting as the gain in theregenerative amplifier is saturated. The output spectrum of theamplified seed pulse is entirely shifted from the spectrum of the inputseed source. Spectral matching the seed source to the particularregenerative amplifier needs to be considered as well as spectralinstability with time.

Similar affects are also observed and must be considered in Yb:dopedfiber amplifiers. A Yb:doped fiber mode-locked laser can operate from980 nanometers to 1100 nanometers. These sources can be the seed sourcefor any of the different Yb: or Nd: materials utilized in theregenerative amplifier. This allows for some economies, since the sameplatform can be utilized for all of the regenerative amplifier designs.However, along with the larger flexibility for lasing wavelength due tothe large bandwidth of Yb:doped fiber comes the need for control inmatching the spectral central wavelength and bandwidth of theregenerative amplifier over a long period of time. One of the aspects ofthe present invention addresses these issues.

The particular building blocks of this system are an Yb:doped fiberoscillator, one or two pulse stretchers, an Yb:doped fiber amplifier,and a Yb: or Nd: doped solid state regenerative amplifier. At eachstage, there is the potential of flexibility and control of the centerwavelength and the bandwidth of the spectral output. This flexibilityallows the Yb: oscillator to be used for each of these differentsystems, but requires a level of control to design a system that willremain reliable for a number of years. Issues concerning the centralwavelength of the spectrum and the spectral width need to be addressed.

The central wavelength in each of the main modules in this system isflexible. For a Yb: doped fiber mode-locked oscillator, there are twobasic designs for this source in terms of central wavelength. One designuses a tuner in the laser that determines the central wavelength and thespectral width by the bandwidth of the tuner. This design produces anarrow spectral width and gives longer pulses. It is more flexible sincethe mechanical position of the tuner, which is fixed, determines thewavelength. Means of controlling and stabilizing the wavelength for thesystem can be in the oscillator. Methods of controlling the wavelengthinclude tuning with an intracavity grating pair as reported by L. Gomes,L. Orsila, T. Jouhti and O. Okhotnikov, Picosecond SESAM-Based YtterbiumMode-Locked Fiber Lasers, IEEE Journal of Selected Topics in QuantumElectronics, Vol. 10, No. 1, pp. 129-136, January/February 2004. Othermeans of tuning the wavelength are stretching or compressing a fibergrating, temperature control of a fiber grating or the use of anintracavity etalon. For long term stability, a feedback circuit can beutilized to stabilize wavelength. Spectral measurement can beaccomplished by photodiodes measuring transmission through the fibergrating stretcher or etalon. Another is reflections off a bulk stretcheror compressor grating. It is preferable to measure the spectrum afterthe regenerative amplifier since with time the wavelength of theoscillator may be changed to keep the regenerative amplifier operatingat the same wavelength.

The second means of designing a mode-locked fiber oscillator is toutilize the Yb:glass spectral bandwidth without an intracavity linenarrowing element. These oscillators have larger spectral widths andshorter pulses than the design discussed above. The center wavelengthand spectral width are then determined by the particular designparameters, e.g., the Yb: ion doping concentration in the fiber, theexcitation level of the amplifier, the length of the fiber amplifier,saturable absorber design, cavity dispersion, pump wavelength and theexcitation level along the length of the Yb:doped fiber. Examples ofthis type of design include the fiber lasers described in U.S. Pat. Nos.5,689,519 and 5,617,434 and U.S. Patent Publication No. 20040114641 A1.Some wavelength selection can be used in these designs also. Theseoscillators have less flexibility with tuning but, in general, can bedesigned to operate at predefined wavelengths. The spectral width alsocan be adjusted to some point but may be too broad for some materials.The stretcher can also be used for shaping the spectral pulse shapemoving the center and changing the width. Since any spectral narrowingcomponent is a loss element, it should be performed before the fiberamplifier. The fiber amplifier is operated typically far in saturationand thus its efficiency is rather insensitive to the input pulse energy.The spectral output of a mode-locked fiber oscillator is sufficientlystable for long-term injection into a typical regenerative amplifier andfeedback is not necessary with this laser as should be considered forthe tunable mode-locked fiber laser.

It is anticipated with time the loss in the regenerative amplifier willincrease from slight misalignment of the cavity, dirt on the opticalsurfaces, slight misalignment of the Pöckels cell or a slight drift ofthe voltages on the Pöckels cell. This is normal wear on a regenerativeamplifier. In a scientific environment, it is standard operatingpractice to have a scientist realign the regenerative amplifierperiodically. For industrial applications, however, this should beavoided. Typically, the increase in loss in a cavity can be compensatedfor by increasing the gain. However, in the Yb: materials, this changesthe gain as a function of wavelength. Typically, this cannot betolerated since the pulse compressor is wavelength dependent.

Fortunately, there are methods for mitigating this affect. One is to uselarger gratings that allow some changes in the central wavelength.Another is to use no pulse compression or CPA as is described for thethin disc regenerative amplifier in M. H. Niemz, A. Kasenbacher, M.Strassl, A. Backer, A. Beyertt, D. Nickel and A. Giesen, Tooth AblationUsing a CPA-Free Thin Disk Femtosecond Laser System, Applied PhysicsB-Lasers and Optics 79 (3): 269-271, August 2004. However, the gainshift can be large enough to move the seed out of the gain profile or toreshape the spectrum of the seed and affect the temporal pulse shape andpulse duration. This can be best understood by looking at the gainprofiles of Yb:glass for different pumping rates as shown in FIG. 2 fromC. Honninger, R. Paschotta, M. Graf, F. Morier-Genoud, G. Zhang, M.Moser, S. Biswal, J. Nees, A. Braun, G. A. Mourou, I. Johannsen, A.Giesen, W. Seeber and U. Keller, Ultrafast Ytterbium-Doped Bulk Lasersand Laser Amplifiers, Applied Physics B-Lasers And Optics 69 (1): 3-17,July 1999. If the seed is around 1.05 micrometers with 2.5% excitationlevel and the gain needs to be increased to the 5% excitation level,then part of the spectrum of the seed will go from having no gain tobeing at the peak gain of the regenerative amplifier. Injection to theblue part of the gain profile will see the most change in spectralreshaping. However, if the seed is at 1.08 micrometer and the loss isincreased by 0.03 uniformly with wavelength, then no amount of pumpingwill give net gain at that wavelength. This part of the spectrum movesoutside the spectral window with gain. A more likely scenario is thatthe seed would be at a wavelength near 1.05 micrometers. As gain isincreased in the regenerative amplifier, to mitigate loss, the gainslope will increase and the spectral shifting will be increased. Tomaintain the output wavelength, two solutions are proposed. One solutionis to increase the seed input energy, since the amount of shift dependson the overall gain, and the overall gain can be decreased by increasingthe input. The other solution is to red shift the seed so that theoverall shift does increase, but the wavelength of the output remainsthe same.

There are a number of ways to shift the central wavelength in the fibersource that will be discussed in the specific embodiments. The otherissue is matching the spectral width of the Yb: fiber seed source to theneeded spectral width for the regenerative amplifier. Typically, thespectral width will be too large from the Yb: oscillator directly.Therefore, means to reduce the bandwidth efficiently are desirable. TheYb: oscillator can be designed also to have the same or smallerbandwidth than that needed to seed the regenerative amplifier. In thesecases, the bandwidth would need to be kept the same or increased in thefiber amplifier.

An additional improvement for these lasers that is not possible withsolid-state oscillators is that the repetition rate can be lowered tomatch the repetition rate of the regenerative amplifier whilesignificantly increasing the pulse energy from the fiber amplifier. Thelower repetition rate reduces the tolerances on the Nickels cell switchin the regenerative amplifier. With 50-100 megahertz sources, theNickels cell needs near 100% discrimination to prevent two pulses frombeing injected and amplified. If the repetition rate of the fiberamplifier is equal to the repetition rate of the regenerative amplifier,there is no need for discrimination between pulses and there just needsto be sufficient loss to hold off spontaneous lasing of the regenerativeamplifier. The single pass gain is 5-30%, so this is the loss needed.Higher seed energies are also desired to reduce gain narrowing in theregenerative amplifier. Higher pulse energies also increase thestability of a low gain regenerative amplifier. It is not necessary tomatch the repetition rates of the injection seed and the regenerativeamplifier. However, it will give the highest injection pulse energy.There may be reasons for minimizing the pulse energy in the fiberamplifier. The AOM will only be beneficial if the pulse that normallyprecedes the pulse injected into the regenerative amplifier is blockedby the AOM.

Additional aspects and advantages of the present invention will be setforth in part in the description that follows and in part will beobvious from the description, or may be learned by practice of thepresent invention. The aspects and advantages of the present inventionwill become apparent from the following detailed description and withreference to the accompanying drawing figures, and may be realized andattained by means of the instrumentalities and combinations particularlypointed out in the appended claims.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are incorporated in and constitute apart of this specification illustrate embodiments of the invention and,together with the description, serve to explain the aspects, advantagesand principles of the invention. In the drawings,

FIG. 1 is a block diagram on the basic components of the presentinvention.

FIG. 2 is an embodiment of the present invention that uses a Yb:glassregenerative amplifier.

FIG. 3 is another embodiment of the present invention that uses a Yb:YAGregenerative amplifier.

FIG. 4 is another embodiment of the present invention that uses aYb:glass regenerative amplifier.

FIG. 5 illustrates the spectral shift in Yb:fiber.

FIG. 6 is another embodiment of the present invention that uses aYb:glass regenerative amplifier.

FIG. 7 is another embodiment of the present invention that uses aYb:glass regenerative amplifier and a Raman Soliton compressor.

FIG. 8 is another embodiment of the present invention that uses aYb:glass regenerative amplifier and an acoustic-optical modulator.

FIG. 9 is another embodiment of the present invention that uses aYb:glass regenerative amplifier, an acoustic-optical modulator and fibergratings for pulse stretchers.

FIG. 10 is another embodiment of a laser system that uses the oscillatorand regenerative amplifier of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

A generalized illustration of the system of the invention is shown inFIG. 1. The pulses are generated in the Yb: or Nd: doped fibermode-locked oscillator 11. These are coupled into a pulse conditioner 12for spectral narrowing, broadening or shaping, wavelength converting,temporal pulse compression or stretching, pulse attenuation and/orlowering the repetition rate of the pulse train. The pulses aresubsequently coupled into an Yb: or Nd: fiber amplifier 13. Pulsestretcher 14 provides further pulse stretching before the amplificationin the regenerative amplifier 15 that is based on an Nd: or Yb: dopedsolid-state laser material. The compressor 16 compresses the pulse backto near transform limit. The six subsystems can be utilized to variousdegrees as is described in the subsequent embodiments.

The first embodiment is shown in FIG. 2. The Yb: oscillator 20 is thesame as shown in FIG. 8 of co-pending U.S. application Ser. No.09/576,772. The pulse width of the oscillator is 200 femtoseconds. Thespectral width is about 12 nanometers and the wavelength centered at1053 nanometers. The repetition rate of the oscillator is about 50 MHzand the average power about 10 milliwatts. This oscillator is shown tobe cladding pumped but core pumping may also be utilized and desirable.It is desired to maintain the spectral width of this pulse and theability to recompress this pulse at the end of the system. Apolarization-maintaining fiber 21 is spliced to the oscillator withsufficient positive dispersion to stretch the pulse to 8 picoseconds. Anisolator may be placed between the oscillator and the stretching fiberto make the design more robust. A core pumped Yb: amplifier 22 thenamplifies this pulse. In the amplifier 22, the center wavelength remainsat 1053 nanometers. The pulse stretcher 23 is sufficient to preventnonlinear effects as the pulse is amplified up to an average power of200 milliwatts or pulse energy of 4 nanojoules in the optical fiber. Thestretching before the amplifier was described in co-pending U.S.application Ser. No. 09/576,772, and utilized in the laser described andutilized in U.S. Pat. No. 6,760,356. This 8 picosecond pulse can befurther stretched to 100 picoseconds with a bulk grating stretcher ofthe Martinez design before amplifying in a Yb:glass amplifier 25 to apulse energies greater than one microjoule.

The compressor 24 can be utilized to compensate for the dispersion ofboth stretchers as well as the dispersion of the amplifier and tocompress the pulses close to the transform limit near 250 femtosecondsat a repetition rate near 10-100 kilohertz. This embodiment can bealtered to have all the pulse stretching before the fiber amplifier 22.However, the stretching can be done by a linear fiber grating and/or acombination of fibers with different dispersion as is disclosed in FIGS.5, 12 and 13 co-pending U.S. application Ser. No. 09/576,772. It canalso be a non-linear chirped fiber grating that matches the compressionof the bulk compressor after the regenerative amplifier as is alsodisclosed in co-pending U.S. application Ser. No. 09/576,772.

This same embodiment can be utilized with a Yb:KGd(WO₄)² regenerativeamplifier. A similar 200 femtosecond source is utilized that is tuneddesigned to operate between 1040 to 1048 nanometers.

In another embodiment shown in FIG. 3, the regenerative amplifier 31 isbased on crystalline Yb: materials, such as Yb:YAG, where the spectralwidth is somewhat narrower than the oscillator utilized in the primaryembodiment and can amplify longer pulses around 800 femtoseconds. Theoscillator 30 can be spectrally narrowed by redesigning the oscillatorwith an intracavity filter. A fiber grating that is spectrally narrowedcan be used to accomplish the required spectral narrowing. However, afilter 35 based on an etalon or fiber grating can be utilized after theoscillator and before the amplifier as is shown in FIG. 9 of co-pendingU.S. application Ser. No. 09/576,772. More specifically, the filter canalso be placed between the oscillator and the fiber stretcher as shownor between the fiber stretcher and the fiber amplifier.

In addition, the embodiment can be modified to be utilized forcrystalline Yb: and Nd: doped materials that have a spectral bandwidththat can only amplify pulses longer than 500 femtoseconds. Thesematerials include, but are not limited to, Nd:YAG, Nd:YLF andNd:Vanadate. Regenerative amplifiers of Nd:YLF and Nd:Vanadate areavailable from commercial sources with output pulse widths of 8 and 12picoseconds, respectively. Since these pulse widths and the 200femtosecond pulse width are near transform limited, the source has aspectral width 8 picoseconds/0.2 picoseconds (40) and 12 picoseconds/0.2picoseconds (60) times broader respectively. Thus, only 1/40 to 1/60 ofthe pulse energy gets amplified and the required seed pulse energyincreases by 40 to 60 times. To avoid a need for this larger pulseenergy, the spectrum can be narrowed before or during amplification inthe fiber amplifier. Loss from spectral narrowing before amplificationis extremely efficient since the efficiency of the fiber amplifier isrelatively insensitive to the input power. Means for narrowing thespectrum is a thin film bandpass filter 35 or a fiber grating. The fibergrating can also be utilized for dispersion management. For these longerpulses, chirped pulse amplification is normally not used since thecompressors and stretchers become inordinately large and amplificationto the one millijoule range is possible in bulk materials withoutnonlinear affects. Spectral compression can also be accomplished in thefiber by either the use of a fiber with anomalous dispersion or achirped pulse input. It is difficult to narrow the spectrum in the fiberby nonlinear spectral compression by a factor of 40 or 60 times. Thus,spectral narrowing by a filter or a fiber grating may need to be used incombination. It is important to use an apodized fiber grating sinceripple in the spectrum from steep edged gratings causes unacceptablepulse distortions.

In an alternative embodiment shown in FIG. 4, it may be preferred not tostretch the pulses but to utilize a multimode fiber 41 to amplify thesingle mode. The area of the fiber can be increased so that spectralbroadening can be avoided. A similar oscillator 20 is utilized thatoutputs 200 femtosecond pulses. The spectral width is about 13nanometers and the wavelength centered at 1058 nanometers. Therepetition rate of the oscillator 20 is about 50 megahertz and theaverage power about 10 milliwatts. This pulse is then amplified by amultimode fiber amplifier 41 with a core diameter of 30 micrometers anda V number of 5. In the fiber amplifier 41, the center wavelength isshifted by 5 nanometers to 1053 nanometers. An example of the shift ofthe spectra in a fiber amplifier is illustrated in FIG. 5. This exampleis FIG. 6 from U.S. Provisional Patent Application No. 60/539,110, whichis incorporated by reference in its entirety. The peak of the inputspectrum is 1047 nanometers and the peak of the output spectrum is 1045nanometers. The spectrum is also narrowed from 13 nanometers to 6nanometers. The output pulse is stretched minimally from the dispersionof the fiber amplifier 41 to approximately one picosecond. The pulse isfurther stretched in a bulk grating stretcher 23, amplified in aYb:glass regenerative amplifier 42 and compressed back to 250femtoseconds in a bulk grating compressor 24. The frequency shift in thefiber amplifier 41 can be used to tune the oscillator wavelength to theregenerative amplifier 42 wavelength. This shift normally will alsonarrow the spectrum of the pulse. Typically, if the fiber amplifier 41is uniformly and highly excited, then the input seed wavelength will beshifted toward the gain center. However, if the fiber amplifier 41 is anoverly long and co-propagating pump, the later end of the fiberamplifier 41 will not be as highly pumped and will have gain centertoward 1.06 micrometers while there is substantial loss near 1.04micrometers. This fiber amplifier 41 can shift the frequency from 1.04micrometers to longer wavelengths. This amplifier 41 can then be used tochange the spectral shift with time. The amplifier 41 can be pumped botha co-propagating pump laser and a counter-propagating pump laser. Byvarying the pump power of the two pump lasers, the wavelength can beshifted. This will also be suitable for any fiber amplifier 41 includinga single mode core pumped amplifier. An alternative to the multimodefiber amplifier with a solid core is a multimode photonic crystal fiberamplifier as described in co-pending U.S. application Ser. No.10/927,374, which is assigned to the common assignee.

Another example utilizing the wavelength shift of the fiber amplifier isin the case of injecting a regenerative amplifier at wavelengths shorterthan the central wavelength such as at 1030 nanometers. It is difficultto operate the short pulse fiber oscillator without tuning elements atthis wavelength since it is difficult to move the gain center to thiswavelength without very high gain. Thus, the oscillator operates ataround 1033 nanometers. Then the amplifier is designed to be short,highly excited with core pumping and high concentration so its gaincenter is shorter than 1030 nanometers. It then pulls the wavelength ofthe oscillator to 1030 nanometers. The spectral width is also narrowedfrom around 13 nm to 6 nm as is desired. In this case, the fiberamplifier gain can be used to give a variable blue shifting of the seedto the regenerative amplifier in order to stabilize the outputwavelength of the regenerative amplifier.

In another embodiment shown in FIG. 6, a mode-locked fiber source 61 canbe utilized that has a narrower spectrum and longer pulse width than isneeded for injection seeding the Yb:glass or Yb:KGd(WO₄)² regenerativeamplifiers 66. This optical source can be then spectrally broadened in aYb: amplifier 62 operating as parabolic pulse amplifier as disclosed inco-pending U.S. application Ser. No. 09/576,772. A suitable source isthe Femtomaster1060 from Fianium or the source described by L. Gomes, L.Orsila, T. Jouhti and O. Okhotnikov, Picosecond SESAM-Based YtterbiumMode-Locked Fiber Lasers, IEEE Journal of Selected Topics in QuantumElectronics, Vol. 10, No. 1, pp. 129-136, January/February 2004. Theoutput pulses from this mode-locked Yb: fiber laser have an averagepower of 10 milliwatts, a center wavelength between 1040 and 1120nanometers, a temporal width of 3 picoseconds and a bandwidth of 0.35nanometers. An advantage of a narrow spectral width mode-locked fiberlaser is that it can have an intracavity tuning element and thus betunable. If the pulse is spectrally broadened, it is important that itbe linearly chirped so that it can be compressed to near its bandwidthlimit. Often, the spectral wings of the pulse are not recompressable.These wings can be filtered out in a bandwidth filter 63 before thepulse stretcher 64, but energy is lost on the output. It is advantageousto spectrally filter the pulse after the amplification in the parabolicpulse amplifier 62. The pulse stretcher 64 can also be utilized as aspectral filter. The gain profile of the regenerative amplifier 66 canbe used. The spectral width from the parabolic pulse amplifier 62 mustbe broader than the gain bandwidth. Designing the system such that thespectral broadening by the parabolic pulse amplifier 62 is greater thanthe spectral transmission of the spectral filter will assure a morelinear chirp and a cleaner output temporal pulse from the regenerativeamplifier 66. In a nonlinear amplifier, the pulse will be amplified fromthe picojoule range to near 4 nanojoules, the spectrum will be broadenedto be equal to or greater than the spectral gain width of theregenerative amplifier 66, which is near 10 nanometers, and the pulsewill be stretched to around 10 picoseconds in the parabolic pulseamplifier 62. Normally, the pulse would be recompressed beforestretching in the regenerative amplifier stretcher as was mentionedbefore. However, the compressor 65 can compensate for this stretchingand the stretching in the pulse stretcher 64 for the regenerativeamplifier 66.

An alternative embodiment utilizing the long pulse Yb:fiber mode-lockedlaser is shown in FIG. 7. In this case, a Raman Soliton compressor 73 isutilized for frequency tuning and for compressing the laser pulse to therequired 200 femtosecond pulse for Yb:glass. The Raman Solitoncompressor 73 requires negative dispersion fiber and for wavelengthsfrom 0.78 to 1 micrometer, and a holey fiber is disclosed in co-pendingU.S. application Ser. No. 09/576,772. A similar disclosure of thissource is in U.S. Patent Publication No. 2002/0168161. The pulse is nowsimilar to that generated from the short pulse mode-locked laser andrequires some stretching or a multimode amplifier as was describedpreviously.

For many of the new applications in micromachining, it is desirable tohave pulse repetition rates greater than 10 kilohertz. It is difficultto design an electro-optic modulator that can operate at greater than 10kilohertz and particularly from 100-500 kilohertz. Until recently, theonly regenerative amplifier operating in this regime has been aTi:sapphire system called the REGA by Coherent that utilizes an AOMmodulator. This laser is described by T. B. Norris, Femtosecond PulseAmplification at 250 kHz With a Ti:Sapphire Regenerative Amplifier andApplication to Continuum Generation, Optics Letters 17, 1009, (1992).However, the AOM is too lossy to be utilized with Nd: and Yb: dopedmaterials. The problem with the EO is best understood by explaining thedifferent steps in its operation. This is well explained by D. Harterand P. Bado, Wavelength Tunable Alexandrite Regenerative Amplifier,Applied Optics 27 (21): 4392-4395, Nov. 1, 1988. There is the 1) holdingoff the lasing, 2) switching in a single pulse, 3) reducing the loss tonear zero for the entire buildup time, and 4) the switching out of onepulse. Holding off lasing only requires a loss equal to the gain that isabout 10% in these materials. Switching in a single pulse is a rigorousrequirement, since it requires the other pulses in the pulse train notto remain in the cavity. Thus, a 100:1 ratio is required. Reducing theloss to near zero for the entire build-up time requires also about a100:1 ratio. This is difficult if the need is to switch from a quarterwave for no gain to keep only one pulse to enter the cavity and then toswitch to zero wave retardation. These crystals are piezoelectric andacoustic ringing changes the birefringence over the build-up time of theregenerative amplifier. Recent progress has been made by the utilizationof new materials as is described in International Application No. WO04/057412 A2. However, it would be desirable to have the switching statenot from quarter wave for 100% loss for step 2) but less in order togive the 10% loss required to hold off lasing for step 1). The voltageis less and the piezoelectric effect is less so step 3), reducing theloss to near zero for the entire buildup time is also much simpler.

A way of removing the need for step 2, switching in a single pulse, isto add a second Pöckels cell or an EO switch between the high repetitionsource and the regenerative amplifiers. The repetition rate of thepulses reaching the regenerative amplifier is reduced to the repetitionrate of the regenerative amplifier so there is only one pulse present tobe switched in. This is what has been implemented in the design for thethin disk regenerative amplifier described in International ApplicationNo. WO 04/068657 A1 as mentioned above. However, in a fiber lasersource, there is a better alternative for placing an AOM between thefiber oscillator and the fiber amplifier as shown in FIG. 14 ofco-pending U.S. application Ser. No. 09/576,772. The advantage here isthe loss of the AOM is not important, and if the fiber amplifier isoperated in the 10-500 kilohertz range of the regenerative amplifierrather than the 50-100 megahertz range of the fiber mode-lockedoscillator, then the pulse energy out can increased by a factor of 100.This is an extreme advantage for the regenerative amplifier. With such alow gain for Nd: and Yb: regenerative amplifiers, there needs to be manypasses through the regenerative amplifier, which makes the system verysensitive to changes in intracavity loss, thus by decreasing the neededoverall gain, the system becomes less sensitive. Also, less overall gainneeded from the narrow line width regenerative amplifier reduces gainnarrowing so shorter pulses are possible.

An embodiment of this design is shown in FIG. 8. A short pulse Yb:fibermode-locked laser 81 is the source. The pulses are stretched to 20-100picoseconds in a fiber stretcher 83. Other stretchers can also beutilized. The fiber amplifier 84 can be a multimode amplifier and therest of the system is similar to the embodiment shown in FIG. 2.However, in this particular case, the grating compressor 86 needs tocompensate for additional stretching from the fiber stretcher 83.

In addition, the AOM 82 can be utilized to stabilize the regenerativeamplifier 87. There is a direct measurement of the change in loss in theregenerative amplifier 87. It is the number of round trips for the pulseto build up to the desired energy. The buildup time is usually measuredwith a photodiode through a small transmission in one of the cavitymirrors, and when the pulse is at the desired energy, the Pöckels switchis activated to switch out the pulse. This build-up time varies as muchas a microsecond but typically slowly with time. This pulse jitter makesit difficult to synchronize to other processes. The AOM 82 can be variedto only partially switch out the pulse so it can operate as a variableattenuator. By varying the injection energy, the buildup time can bestabilized. If the pulse energy from the fiber amplifier 84 is changeddramatically, then the nonlinearity will also change dramatically andneeds to be considered. One solution is to use a second AOM or variableattenuator at the output of the fiber amplifier 84. The other is toutilize a short pulse source where the nonlinearities are minimized inthe fiber amplifier 84. If the pulse energies are increased by a factorof 100 from nanojoules to hundreds of nanojoules, then a multimode fiberamplifier for amplifying single mode beams can be utilized. The otheralternative is for further stretching of the pulse before the fiberamplifier as has been previously mentioned or a grating that matches thedispersion of the bulk grating compressor.

International Application No. WO 04/068657 A1 discloses theamplification of unstretched picosecond pulses in the regenerativeamplifier with a compressor. For this design, it is necessary tocompensate for the dispersion for each pass in the regenerativeamplifier. The concept is to have dispersion compensating elements inthe cavity for this purpose. The first 100 femtosecond chirped pulseamplification regenerative amplifier used the concepts reported by M.Pessot, J. Squier, G. Mourou and D. Harter, Chirped-Pulse Amplificationof 100-Fsec Pulses, Optics Letters 14 (15): 797-799, Aug. 1, 1989. Thissystem was extremely difficult to align and was abandoned. In the fibersystem, it may be convenient to pre-compensate for the accumulateddispersion in the cavity. At low pulse energies at the oscillator, aholey fiber that is dispersion shifted to give anomalous dispersion at 1micron can be utilized. Normally, these fibers have very small cores andare highly nonlinear. Thus, they need to be utilized at low powers. Thisfiber could also be utilized for broadening the spectrum of the longerpulse and the self-phase modulation can produce the needed chirp.

Another method is to utilize fiber gratings since either sign ofdispersion is possible. It may be difficult to get the small amount ofdispersion compensation needed from a fiber grating. One possibility isto use a fiber grating with one sign of chirp before the fiber amplifierthat is significantly larger than needed. Then, after the fiberamplifier, the opposite chirp is utilized. The fiber gratings aremismatched according to the pre-compensating chirp required. It may bepossible to utilize matching fiber gratings and to utilize stretching orheating the gratings in order to obtain the pre-compensating chirp. Thiswould simplify the design of this system since the temperature or stressis changed until the shortest output pulse is obtained. FIG. 9illustrates such an embodiment. The fiber gratings 97, 98 areillustrated in FIG. 12 of co-pending U.S. application Ser. No.09/576,772. The pulse stretching from the fiber gratings 97, 98 can beas large as 1 nanosecond for a 10 centimeter grating so a single modefiber amplifier 94 can be utilized. The second fiber grating 98 isdifferent from the first grating 97 to give the needed pre-compensationto the thin disc regenerative amplifier 96 without chirped pulseamplification. It may also to utilize the first fiber grating 97 as aspectral filter, since the Yb:KYW thin disc regenerative amplifier 96will not amplify the entire 13 nanometers from the mode-locked laser.The fiber grating 99 stretches the pulses output from the mode-lockedlaser prior to being input into the acousto-optical modulator 92.

In order for any of the systems to be maintain dispersion compensation,the number of round trips needs to be stabilized or the dispersioncompensation needs to be variable. The methods above can be utilized ina feedback system.

An alternative embodiment of the present invention comprises acontrolled chirped-pulse amplified Yb:YAG laser, which is a high averagepower system that produces short pulse-widths for various applications.As shown in FIG. 10, the overall system contains a laser source 101, apulse stretcher and compressor 102 (herein referred to as“stretcher-compressor”), a preamplifier 103 constructed to receivestretched laser pulses and to produce amplified stretched pulses, apower amplifier 104 constructed to receive and to produce furtheramplified stretched pulses, a beam delivery system 105 and a controlsystem to monitor and control laser power levels and maintain alignment106. The laser source 101 is a commercially available fiber oscillatorcapable of providing the necessary bandwidth and high repetition ratefor the invention. However, any laser material and mode-lockingmechanism capable of producing pulses of the desired duration andbandwidth can be employed. Exemplary laser materials includeNeodymium(Nd)-doped glass, Neodymium-doped yttrium lithium fluoride,Yb:YAG, Ti:Sapphire, Yb:glass, KGW, KYW, YLF, S-FAP, YALO, YCOB andGdCOB or other broad bandwidth solid state materials that can bediode-pumped to produce lasing gain at the wavelength of the stretchedlaser pulses.

The stretcher-compressor 102 is an optical dispersive component thatstretches laser pulses for amplification and compresses amplifiedstretched pulses to a desired temporal pulse-width prior to beingdirected to a workpiece by a beam delivery system. Pulse stretching hasbeen previously demonstrated U.S. Pat. No. 5,960,016 issued to Perry etal.

Temporal stretching of the pulses from the laser source 101 by thestretcher-compressor 102 or for example by a chirped fiber Bragg gratingacting as a pulse stretcher, decreases the peak power intensity of eachindividually stretched pulse because peak power is inverselyproportional to the temporal duration of each individual pulse, (i.e.,the longer in temporal pulse duration, the lower in peak power).

The embodiment shown in FIG. 10 uses the stretcher-compressor 102 totemporally stretch the individual short pulses, (e.g., 8 picoseconds)from the laser source 101 up to nanoseconds in time duration to preventoptical damage to components involved in the amplification process ofthe laser pulses. The stretched pulses are serially directed to thepreamplifier 103 for first amplification from at least 50 picojoules ofstretched pulse energy. The first amplified stretched pulses aredirected to power amplifier 104 to second amplify the energy of eachindividually stretched pulse from about 0.5 millijoules to at least 25millijoules. The stretched second amplified pulse output from the poweramplifier 104 is then serially directed to the stretcher-compressor 102to compress the individual pulses temporally (e.g., to picoseconds).Although the compression process from the stretcher-compressor 102results in a slight loss of energy,(e.g., due to reflection losses,etc.), the amplification process is sufficient to produce at least 12.5millijoules of output system energy to be directed by beam deliverysystem 105 to a workpiece (not shown) for material processing.

The preamplifier 103 and the power amplifier 104 of the embodimentillustrated in FIG. 10 can comprise multiple stages and preferablyutilize Yb:YAG as the lasing material. Yb:YAG is the optimum choiceamong several suitable lasing materials because the material has theproperties of low thermal loading, a long upper state storage time, asuitable wavelength of absorption to enable direct diode pumping andsufficient gain bandwidth to support the amplification with minimalspectral narrowing of the pulse.

However, any lasing material with sufficient spectral bandwidth, a longupper state storage lifetime, low thermal loading properties, and thatcan also be directly diode pumped may be used. Exemplary laser materialsare Nd:doped glass, and Nd:doped yttrium lithium fluoride, Ti:Sapphire,Yb:YAG, Yb:glass, KGW, KYW, YLF, S-FAP, YALO, YCOB and GdCOB. Theembodiment illustrated in FIG. 10 provides a short pulse laser systemthat uses end-pumped Yb:YAG amplifiers in a chirped pulse amplificationarchitecture that operates between about 1022 and about 1088 nanometers,preferably between about 1029 and about 1031 nanometers, at high averagepower (e.g., between about 40 and about 100 watts).

The control system 106 can be positioned between each stage of thepresent invention as an active pointing and centering system to keep thesystem aligned, and can include a very stable platform and/orenvironmental controls. The control system 106 compensates for slowdrifts due to thermal gradients. The output power is under activecontrol and is monitored in beam delivery system 105 by a power meterand amplifier gain is adjusted using conventional optics (e.g., awaveplate and polarizer combination to attenuate and increase powerlevels). The beam delivery system 105 uses an opto-mechanical means todirect the high average power, short pulsed output of the embodimentillustrated in FIG. 10 to the workpiece (not shown).

In FIG. 10, the laser source 101 can be a commercial, 50 megahertzmode-locked fiber oscillator with Erbium (Er) as the laser material thatoperates with multiple longitudinal modes to generate ultra-shortpulses. The laser source 101 provides a wavelength range between 1022and 1088 nanometers, preferably 1029.7 nanometers. The laser source 101has an average power output of at least 100 milliwatts, at least 2nanojoules of energy, and a bandwidth up to 5 nanometers, preferablygreater than about 2 nanometers. The temporal pulse-width is up to 8.1picosecond (uncompressed), preferably about 800 femtoseconds(compressed), with an amplitude noise of not more that 5% RMS (i.e.,Root Mean Square). The polarization extinction ratio is at least 100:1,with a TEM.sub.00 mode structure, and a beam divergence of at least 1.5milliradians.

In the embodiment shown in FIG. 10, the output from the laser source 101is directed to the stretcher-compressor 102. The pulses produced fromthese oscillators are very low in energy, (between about 0.1 nanojoulesand about 2 nanojoules) and are stretched in time by a factor of fivehundred or more prior to amplification.

Pulse stretching prior to amplification is necessary to avoid damagingthe laser amplifiers by an intense pulse (e.g., femtosecond andpicosecond laser pulses with sufficient energy). A dispersive opticaldevice, as shown as the pulse stretcher-compressor 102 in FIG. 10, is adevice in which the time required to traverse the device is a functionof the frequency of the light. This is most commonly achieved by devicesin which the optical path length is a function of frequency. Examplesinclude propagation through a fiber or a chirped fiber Bragg grating,wherein the variation in optical path length with frequency, ω, is givenby the frequency dependence of the refractive index, n(ω), i.e.,L_(opt)=n(ω)L_(fiber). Much higher dispersion can be achieved with pulsestretchers employing a diffraction grating wherein the differentfrequency components of the laser pulse travel physically differentpaths determined by the angular dispersion of the diffraction grating,mλ=sin(θ_(in))+sin(θ_(out)), where λ is the wavelength of the laserlight and θ_(m) and θ_(out) are the input and output angles from thediffraction grating, respectively.

The stretched pulse from the stretcher-compressor 102 is received andamplified by one or more orders of magnitude, with a preferredamplification of six orders of magnitude, (an order of magnitude being amultiplication of 10), to about a millijoule by the preamplifier 103that receives each respective stretched pulse. Although severalconventional types of laser preamplifiers may be used here, thepreferred embodiment is a regenerative amplifier 103. In this device,multiple passes of the pulse can be made through a single amplifierlasing material. However, any type of preamplifier means operatingwithin the parameters described above, such as for example a Yb:dopedfiber amplifier using a large mode-area fiber, (preferably between about25 and about 50 microns in diameter), constructed for short pulse laserapplications can be employed in practice of the invention. This Yb:dopedfiber amplifier would allow for a more compact geometry, because asingle pass through such an amplifier would be capable of poweramplification that is similar to the current regenerative amplifier, butwith better stability.

Another example of a preamplifier 103 operating within design parametersis an optical parametric oscillator, (i.e., a nonlinear material capableof producing a coherent beam of light that can be tuned over a widerange of wavelengths) to obtain the required power levels. Therepetition rate of the system when operating with a regenerativeamplifier as the preamplifier 103 is determined by the optical switchingwithin the regenerative amplifier. Switching of the pulse into and outof the regenerative amplifier is accomplished with optical pulseswitching technology based on the Pöckels or acousto-optics effects.

In the embodiment illustrated in FIG. 10, pulses up to 0.75 millijoulesin energy at 4 kilohertz (i.e., 3 W) are produced by the regenerativeamplifier, which is utilized as a preamplifier 103. Followingamplification from the regenerative amplifier, pulses are seriallydirected to a multi-pass amplifier such as a 4-pass power amplifier 104having one or more Yb:YAG diode pumped solid state amplifierscollectively capable of generating up to 100 W. However, a two-passpower amplifier having one or more Yb:YAG diode pumped solid stateamplifiers constructed to the design output parameters for the poweramplifier 104 can also be employed. The power amplifier 104 usually usesat least two end-pumped heads with lens ducts and kW cw diode arrays(not shown). The embodiment illustrated in FIG. 10 extracts the requiredenergy and beam quality in a manner that is different from similardirectly diode pumped solid-state amplifiers. Similar prior art directdiode pumped systems build up the amplification from noise in anoscillator configuration. The embodiment illustrated in FIG. 10 directsa beam to be further amplified from the preamplifier 103 into amulti-pass amplifier 104 and after the required number of passes iscompleted, the beam has to be directed out of the multi-pass amplifier104. This multi-pass amplifier 104 requires technical enhancement oversimilar prior art multi-pass amplifiers in extracting the energy andbeam quality out of the system, because there is not a defined cavitymode as in an oscillator. Each amplifier, pumps for example, a 4×40millimeter tapered Yb:YAG rod with about 800 W of pump radiation ormore. The single-pass gain under normal operation (825 W pump) is about1.9 for rods that are doped with about 0.55% Yb. Special water-cooledhousings (not shown) for rods efficiently dissipate the heat generatedfrom pumping and minimize Amplified Stimulated Emission (ASE) seededparasitic losses. The power amplifier output optical plane is relayed byan up-collimating afocal telescope (not shown) to a system focusing lens(not shown), for a distance of about 16 to about 18 meters through thestretcher-compressor 102.

Prior to output to the system-focusing lens, output pulses from the4-pass amplifier 104 are directed to stretcher-compressor 102 forcompression of the stretched amplified pulses from the 4-pass amplifier104 of the system. The compressing process incorporates a, highlyefficient (i.e., greater than 90% diffraction efficiency), reflectivediffraction multilayer dielectric grating. The stretcher-compressor 102causes compression of an amplified stretched pulse from about 4nanoseconds to about 2 picoseconds. This final temporal pulse-widthallows for a desired upper limit in order to achieve maximum penetrationof the workpiece (not shown) within permissible time frames, (e.g., fromabout 0.1 second to about 60 seconds), with no heat-affected or slagzone.

The pulse stretcher-compressor 102 dielectric grating exhibitsdiffraction efficiency that is greater than 97% at a 1030 nanometerdesign wavelength. Consequently, the throughput of the four-pass gratingcompressor is at least 70%. The method of producing high peak powerultrashort pulses where the initial short pulse is stretched prior toamplification, amplified and then recompressed in a separate compressornot part of the stretcher, was published by D. Strickland and G. Mourou,Compression of Amplified Chirped Optical Pulses, Optics Communications,Vol. 56, No. 3, pgs. 219-221, December 1985 and M. D. Perry and G.Mourou, Terawatt to Petawatt Subpicosecond Lasers, Science, 264, 917(1994).

The output from the stretcher-compressor 102 is directed to a workpieceheld in an evacuated chamber (not shown) by a computer-controlled beamdelivery system 105. The power output is computer controlled 106 withfeedback loops to maintain from about 0.1 to about 20 Watts of averagepower, (i.e., for a 4 kilohertz repetition rate from the system, 12.5millijoules of energy is needed for 20 Watts of average power).

The embodiment shown in FIG. 10 can produce a plurality of laser pulseswith pulse durations from about 0.05 to less than about 10 picoseconds,with a bandwidth between about 1.5 nanometers and about 35 nanometers.Material processing experiments are performed, wherein the energy perpulse obtainable from the laser system is variable from 1 millijoule toabout 12.5 millijoules (at repetition rates greater than 4 kilohertz)deliverable in a beam having a spot size variable to at least 0.016″ indiameter. Thus, a focused fluence from about 0.1 to less than about 20Joules/centimeter is readily achieved. Such may be effective in ablatingany type of workpiece such as metals, alloys, ceramics, amorphousmaterials and crystals. Various target plane diagnostics such as nearand far field cameras, temporal detectors, a power monitor, anautocorrelator and a spectrometer record the important parameters of thelaser beam at the work piece. The focusing conditions must achieve thethreshold fluence of at least 0.1 Joules/centimeter to achieve theoptimum ablation conditions.

The foregoing description of embodiments of the invention has beenpresented for purposes of illustration and description. It is notintended to be exhaustive or to limit the invention to the precise formdisclosed, and modifications and variations are possible in light of theabove teachings or may be acquired from practice of the invention. Theembodiments were chosen and described in order to explain the principlesof the invention and its practical application to enable one skilled inthe art to utilize the invention in various embodiments and with variousmodifications as are suited to the particular use contemplated.

Thus, while only certain embodiments of the invention have beenspecifically described herein, it will be apparent that numerousmodifications may be made thereto without departing from the spirit andscope of the invention. Further, acronyms are used merely to enhance thereadability of the specification and claims. It should be noted thatthese acronyms are not intended to lessen the generality of the termsused and they should not be construed to restrict the scope of theclaims to the embodiments described therein.

1. A laser apparatus, comprising: a laser pulse source comprising amode-locked fiber laser; a first pulse stretcher configured forstretching said laser pulses to produce one or more stretched laserpulses; a fiber amplifier coupled between said laser pulse source andsaid first pulse stretcher; an amplifier configured to receive each ofsaid stretched pulses to produce amplified stretched pulses, whereinsaid amplifier comprises at least a regenerative amplifier; and a pulsecompressor configured for producing one or more compressed amplifiedlaser pulses obtained from stretched amplified laser pulses; wherein afrequency shift in said fiber amplifier is used to tune said laser pulsesource wavelength to said regenerative amplifier wavelength.
 2. Thelaser apparatus of claim 1, wherein said fiber amplifier uses at leastanomalous dispersion or a chirped pulse input to spectrally narrow saidlaser pulses output from said laser pulse source.
 3. The laser apparatusof claim 1, wherein said fiber amplifier is a multimode fiber amplifier.4. The laser apparatus according to 3, wherein the area of saidmulti-mode fiber amplifier is large enough to avoid spectral broadening.5. The laser apparatus of claim 3, wherein said multimode fiber is amultimode photonic crystal fiber amplifier.
 6. The laser apparatus ofclaim 1, wherein said fiber amplifier is pumped by a co-propagating pumplaser and a counter-propagating pump laser to tune said laser pulsesource wavelength to said regenerative amplifier wavelength.
 7. Thelaser apparatus of claim 1, wherein said fiber amplifier comprises a Yb:or Nd: fiber amplifier that spectrally broadens said laser pulses outputfrom said laser pulse source.
 8. A laser apparatus, comprising: a laserpulse source comprising a mode-locked fiber laser; a first pulsestretcher configured for stretching said laser pulses to produce one ormore stretched laser pulses; a fiber amplifier coupled between saidlaser pulse source and said first pulse stretcher; an amplifierconfigured to receive each of said stretched pulses to produce amplifiedstretched pulses, wherein said amplifier comprises at least aregenerative amplifier; and a pulse compressor configured for producingone or more compressed amplified laser pulses obtained from stretchedamplified laser pulses; wherein a frequency shift in said fiberamplifier is used to spectrally narrow said laser pulses output fromsaid laser pulse source.
 9. A laser apparatus, as claimed in claim 1,further including a second pulse stretcher coupled to said laser pulsesource; and said fiber amplifier being coupled to said second pulsestretcher and said first pulse stretcher.
 10. A mode locked laser systemfor seeding a regenerative amplifier, comprising: a source of laserpulses; a Yb: fiber amplifier for amplifying said pulses; and aregenerative amplifier based on Nd: or Yb: or Ti:Al₂O₃ materials forreceiving said amplified pulses as seed pulses, wherein at least one ofsaid pulse source and said Yb: fiber amplifier includes means forcontrolling a bandwidth and a spectral center of its output to matchthat of said regenerative amplifier. 11-20. (canceled)